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Hubertus Marbach
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Grossostheim, DE
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last 30 patents
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Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
Publication number
20230280647
Publication date
Sep 7, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
Publication number
20230238213
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Ottmar Hoinkis
H01 - BASIC ELECTRIC ELEMENTS