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Hubertus Mattheus Joseph M WEDERSHOVEN
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Immersion lithographic apparatus
Patent number
10,216,095
Issue date
Feb 26, 2019
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
IMMERSION LITHOGRAPHIC APPARATUS
Publication number
20160195821
Publication date
Jul 7, 2016
ASML NETHERLANDS B.V.
Michel RIEPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY