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Patents Grants
last 30 patents
Information
Patent Grant
Integrated circuit system with sub-geometry removal and method of m...
Patent number
8,692,380
Issue date
Apr 8, 2014
GLOBALFOUNDRIES Singapore Pte. Ltd.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuit system with sub-geometry removal and method of m...
Patent number
8,293,546
Issue date
Oct 23, 2012
GLOBALFOUNDRIES Singapore Pte. Ltd.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
Patent number
8,057,968
Issue date
Nov 15, 2011
GLOBALFOUNDRIES Singapore Pte. Ltd.
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for removing radiation side lobes
Patent number
8,048,588
Issue date
Nov 1, 2011
GLOBALFOUNDRIES Singapore Pte. Ltd.
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for contact hole unit cell formation
Patent number
7,556,891
Issue date
Jul 7, 2009
Chartered Semiconductor Manufacturing Ltd.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for dual damascene patterning with single exposure using tri...
Patent number
7,288,366
Issue date
Oct 30, 2007
Chartered Semiconductor Manufacturing Ltd.
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Half tone alternating phase shift masks
Patent number
7,014,962
Issue date
Mar 21, 2006
Chartered Semiconductor Manufacturing, Ltd.
Qun Ying Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM WITH SUB-GEOMETRY REMOVAL AND METHOD OF M...
Publication number
20130043565
Publication date
Feb 21, 2013
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE
Publication number
20100196805
Publication date
Aug 5, 2010
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Sia Kim TAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM WITH SUB-GEOMETRY REMOVAL AND METHOD OF M...
Publication number
20090309192
Publication date
Dec 17, 2009
Chartered Semiconductor Manufacturing LTD.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for contact hole unit cell formation
Publication number
20060088770
Publication date
Apr 27, 2006
Chartered Semiconductor Manufacturing LTD.
Soon Yoeng Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for removing radiation side lobes
Publication number
20060083994
Publication date
Apr 20, 2006
Chartered Semiconductor manufacturing , Ltd.
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for dual damascene patterning with single exposure using tri...
Publication number
20050089763
Publication date
Apr 28, 2005
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Half tone alternating phase shift masks
Publication number
20050058912
Publication date
Mar 17, 2005
Qun Ying Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY