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Hugh R. Grinolds
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Fort Collins, CO, US
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Patents Grants
last 30 patents
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Patent Grant
EUV light source optical elements
Patent number
7,476,887
Issue date
Jan 13, 2009
Cymer, Inc.
Norbert R. Bowering
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Patent Grant
EUV light source optical elements
Patent number
7,193,228
Issue date
Mar 20, 2007
Cymer, Inc.
Norbert R. Bowering
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
EUV light source optical elements
Publication number
20070170378
Publication date
Jul 26, 2007
Cymer, Inc.
Norbert R. Bowering
B82 - NANO-TECHNOLOGY
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Patent Application
EUV light source optical elements
Publication number
20050199830
Publication date
Sep 15, 2005
Norbert R. Bowering
B82 - NANO-TECHNOLOGY