Hugo Silva

Person

Aachen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for controlling the substrate temperature using a plurality...
- Patent number 10,526,705
- Issue date Jan 7, 2020
- Aixtron SE
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device
- Patent number 10,273,580
- Issue date Apr 30, 2019
- Aixtron SE
- Pierre-Arnaud Bodin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas inlet member of a CVD reactor
- Patent number 9,587,312
- Issue date Mar 7, 2017
- Aixtron SE
- Hugo Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming TiSiN thin film layer by using atomic layer depo...
- Patent number 9,159,608
- Issue date Oct 13, 2015
- Aixtron SE
- Woong Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CONTROLLING THE SUBSTRATE TEMPERATURE USING A PLURALITY...
- Publication number 20180223425
- Publication date Aug 9, 2018
- AIXTRON SE
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING DEVICE
- Publication number 20170002462
- Publication date Jan 5, 2017
- AIXTRON SE
- Pierre-Arnaud BODIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REGULATING THE TEMPERATURE IN A PROCESS CH...
- Publication number 20160333479
- Publication date Nov 17, 2016
- AIXTRON SE
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...
- Publication number 20150050806
- Publication date Feb 19, 2015
- AIXTRON SE
- Woong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INLET MEMBER OF A CVD REACTOR
- Publication number 20150007771
- Publication date Jan 8, 2015
- AIXTRON SE
- Hugo Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR AND SUBSTRATE HOLDER FOR A CVD REACTOR
- Publication number 20140287142
- Publication date Sep 25, 2014
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS
- Publication number 20100012036
- Publication date Jan 21, 2010
- Hugo Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Methods for controlling the substrate temperature using a plurality...

Heating device

Gas inlet member of a CVD reactor

Method for forming TiSiN thin film layer by using atomic layer depo...

Patents Applicationslast 30 patents

METHODS FOR CONTROLLING THE SUBSTRATE TEMPERATURE USING A PLURALITY...

HEATING DEVICE

APPARATUS AND METHOD FOR REGULATING THE TEMPERATURE IN A PROCESS CH...

METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...

GAS INLET MEMBER OF A CVD REACTOR

CVD REACTOR AND SUBSTRATE HOLDER FOR A CVD REACTOR

ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS