Hui Ling Han

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Alameda, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
SEAL VENTING IN A SUBSTRATE PROCESSING CHAMBER
- Publication number 20230253189
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Hui Ling Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MID-RING EROSION COMPENSATION IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230162953
- Publication date May 25, 2023
- LAM RESEARCH CORPORATION
- Hui Ling HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20220285136
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Hui Ling HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED TRANSFER OF EDGE RING REQUIRING ROTATIONAL ALIGNMENT
- Publication number 20220246408
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT
- Publication number 20220122878
- Publication date Apr 21, 2022
- LAM RESEARCH CORPORATION
- Joanna Wu
- H01 - BASIC ELECTRIC ELEMENTS