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Hui Zheng
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Guard for electrostatic chuck
Patent number
6,944,006
Issue date
Sep 13, 2005
Applied Materials, Inc.
Hui Zheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Guard for electrostatic chuck
Publication number
20040196613
Publication date
Oct 7, 2004
APPLIED MATERIALS, INC.
Hui Zheng
H01 - BASIC ELECTRIC ELEMENTS