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Suwon, KR
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last 30 patents
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Patent Grant
Method for manufacturing a shield for an inductively-couple plasma...
Patent number
6,585,907
Issue date
Jul 1, 2003
Samsung Electronics Co., Ltd.
Eun-Hee Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing head of a chemical mechanical polishing apparatus and, re...
Patent number
6,443,826
Issue date
Sep 3, 2002
Samsung Electronics Co., Ltd.
Yun-Sik Yang
B24 - GRINDING POLISHING
Information
Patent Grant
Inductive-coupled plasma apparatus employing shield and method for...
Patent number
6,251,241
Issue date
Jun 26, 2001
Samsung Electronics Co., Ltd.
Eun-Hee Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing system having means for reducing...
Patent number
6,039,770
Issue date
Mar 21, 2000
Samsung Electronics Co., Ltd.
Yun-sik Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of etching metallic film for semiconductor devices
Patent number
6,037,267
Issue date
Mar 14, 2000
Samsung Electronics Co., Ltd.
Sung-kyeong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UV irradiation apparatus
Patent number
5,872,365
Issue date
Feb 16, 1999
Samsung Electronics Co., Ltd.
Kyoon-hee Goh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY