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Patents Grants
last 30 patents
Information
Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
Patent number
12,165,866
Issue date
Dec 10, 2024
Samsung Electronics Co., Ltd.
Sung Hyun Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
Patent number
12,042,828
Issue date
Jul 23, 2024
Samsung Electronics Co., Ltd.
Seung Min Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus, method for cleaning wafer and method for...
Patent number
11,862,457
Issue date
Jan 2, 2024
Samsung Electronics Co., Ltd.
Seongkeun Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber apparatus
Patent number
11,721,565
Issue date
Aug 8, 2023
Samsung Electronics Co., Ltd.
Yong Jun Choi
B08 - CLEANING
Information
Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
Patent number
11,648,594
Issue date
May 16, 2023
Samsung Electronics Co., Ltd.
Seung Min Shin
B08 - CLEANING
Information
Patent Grant
Wafer cleaning equipment
Patent number
11,605,545
Issue date
Mar 14, 2023
Samsung Electronics Co., Ltd.
Hun Jae Jang
B08 - CLEANING
Information
Patent Grant
Wafer cleaning apparatus, method for cleaning wafer and method for...
Patent number
11,581,182
Issue date
Feb 14, 2023
Samsung Electronics Co., Ltd.
Seongkeun Cho
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
MULTI-CHAMBER APPARATUS
Publication number
20230343613
Publication date
Oct 26, 2023
Samsung Electronics Co., Ltd.
Yong Jun CHOI
B08 - CLEANING
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
Publication number
20230249230
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
Seung Min SHIN
B08 - CLEANING
Information
Patent Application
WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR...
Publication number
20230154743
Publication date
May 18, 2023
Samsung Electronics Co., Ltd.
Seongkeun CHO
B08 - CLEANING
Information
Patent Application
WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR...
Publication number
20220262621
Publication date
Aug 18, 2022
Samsung Electronics Co., Ltd.
Seongkeun CHO
B08 - CLEANING
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
Publication number
20220084812
Publication date
Mar 17, 2022
Samsung Electronics Co., Ltd.
Sung Hyun Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
Publication number
20210060625
Publication date
Mar 4, 2021
Samsung Electronics Co., Ltd.
Seung Min SHIN
B08 - CLEANING
Information
Patent Application
MULTI-CHAMBER APPARATUS
Publication number
20200343113
Publication date
Oct 29, 2020
Samsung Electronics Co., Ltd.
Yong Jun CHOI
B08 - CLEANING
Information
Patent Application
WAFER CLEANING EQUIPMENT
Publication number
20200335361
Publication date
Oct 22, 2020
Samsung Electronics Co., Ltd.
Hun Jae JANG
B08 - CLEANING