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Gyeonggi-do, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma monitoring device using a cylindrical hollow electrode
Patent number
8,767,203
Issue date
Jul 1, 2014
Samsung Electronics Co., Ltd.
Se-Yeon Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor wet etchant and method of forming interconnection str...
Patent number
8,043,974
Issue date
Oct 25, 2011
Samsung Electronics Co., Ltd.
Jung-Dae Park
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Apparatus for purifying air and purifying method thereof
Patent number
7,959,884
Issue date
Jun 14, 2011
Samsung Electronics Co., Ltd.
Hun-Jung Yi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Semiconductor substrate cleaning methods, and methods of manufactur...
Patent number
7,943,562
Issue date
May 17, 2011
Samsung Electronics Co., Ltd.
Da-Hee Lee
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Apparatus and method for analyzing contaminants on wafer
Patent number
7,880,138
Issue date
Feb 1, 2011
Samsung Electronics Co., Ltd.
Jae-Seok Lee
G01 - MEASURING TESTING
Information
Patent Grant
Laser cleaning of backside of wafer for photolithographic processing
Patent number
7,556,712
Issue date
Jul 7, 2009
Samsung Electronics Co., Ltd.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for drying semiconductor substrates
Patent number
7,520,068
Issue date
Apr 21, 2009
Samsung Electronics Co., Ltd.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for drying a wafer, and an apparatus for clean...
Patent number
7,386,944
Issue date
Jun 17, 2008
Samsung Electronics Co., Ltd.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching solution for silicon oxide method of manufacturing a semico...
Patent number
7,351,667
Issue date
Apr 1, 2008
Samsung Electronics Co., Ltd.
Dong-Won Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus to dry substrates
Patent number
7,191,545
Issue date
Mar 20, 2007
Samsung Electronics Co., Ltd.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer guides for processing semiconductor substrates
Patent number
7,100,306
Issue date
Sep 5, 2006
Samsung Electronics Co., Ltd.
Pil-Kwon Jun
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Wafer guides for processing semiconductor substrates
Patent number
6,959,823
Issue date
Nov 1, 2005
Samsung Electronics Co., Ltd.
Pil-Kwon Jun
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Apparatus for manufacturing integrated circuit device
Patent number
6,905,570
Issue date
Jun 14, 2005
Samsung Electronics Co., Ltd.
Kwang-Shin Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for drying a substrate using an isopropyl alcohol vapor
Patent number
6,883,248
Issue date
Apr 26, 2005
Samsung Electronics Co., Ltd.
Yong-Kyun Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for drying semiconductor substrate
Patent number
6,655,042
Issue date
Dec 2, 2003
Samsung Electronics Co., Ltd.
Hun-jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma Generating Units and Process Monitoring Devices and Semicond...
Publication number
20120062887
Publication date
Mar 15, 2012
Se-Yeon Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR WET ETCHANT AND METHOD OF FORMING INTERCONNECTION STR...
Publication number
20120009792
Publication date
Jan 12, 2012
Samsung Electronics Co., Ltd.
Jung-Dae Park
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Methods Of Cleaning And Plasma Processing Apparatus For Manufacturi...
Publication number
20120006351
Publication date
Jan 12, 2012
Samsung Electronics Co., Ltd.
Hyun-Su Jun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR DETECTING METAL CONCENTRATION IN AN ATMOSPHERE
Publication number
20110123400
Publication date
May 26, 2011
Hyun-Kee Hong
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR PURIFYING AIR AND PURIFYING METHOD THEREOF
Publication number
20100158778
Publication date
Jun 24, 2010
Hun-Jung YI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method of forming contact hole and method of manufacturing semicond...
Publication number
20090130842
Publication date
May 21, 2009
Dong-Won Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATES
Publication number
20090120459
Publication date
May 14, 2009
Hun-Jung YI
B08 - CLEANING
Information
Patent Application
Cleaning solution for immersion photolithography system and immersi...
Publication number
20090117499
Publication date
May 7, 2009
Se-yeon Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR SUBSTRATE CLEANING METHODS, AND METHODS OF MANUFACTUR...
Publication number
20090093107
Publication date
Apr 9, 2009
Samsung Electronics Co., LTD
Da-Hee LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR WET ETCHANT AND METHOD OF FORMING INTERCONNECTION STR...
Publication number
20090017626
Publication date
Jan 15, 2009
Samsung Electronics Co., Ltd.
Jung-Dae Park
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Apparatus and method for drying semiconductor substrates
Publication number
20080216347
Publication date
Sep 11, 2008
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR DETECTING METAL CONCENTRATION IN AN ATMOS...
Publication number
20080194037
Publication date
Aug 14, 2008
SAMSUNG ELECTRONICS CO., LTD.
Hyun-Kee Hong
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR ANALYZING CONTAMINANTS ON WAFER
Publication number
20080149827
Publication date
Jun 26, 2008
Samsung Electronics Co., Ltd.
Jae-Seok LEE
G01 - MEASURING TESTING
Information
Patent Application
METAL DETECTION REAGENTS INCLUDING AN AMMONIUM SALT AND METHODS OF...
Publication number
20080145942
Publication date
Jun 19, 2008
SAMSUNG ELECTRONICS CO., LTD.
Hyun-Kee Hong
G01 - MEASURING TESTING
Information
Patent Application
SUPPORTER AND APPARATUS FOR CLEANING SUBSTRATES WITH THE SUPPORTER,...
Publication number
20070181160
Publication date
Aug 9, 2007
Samsung Electronics Co., Ltd.
Hun-Jung YI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for cleaning substrates
Publication number
20070169795
Publication date
Jul 26, 2007
Hun-Jung Yi
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20070157414
Publication date
Jul 12, 2007
SAMSUNG ELECTRONICS CO., LTD.
Hun-Jung YI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for treating substrates with phosphoric acid solution and...
Publication number
20070102023
Publication date
May 10, 2007
Hun-jung Yi
B08 - CLEANING
Information
Patent Application
Etching solution for silicon oxide and method of manufacturing a se...
Publication number
20070090325
Publication date
Apr 26, 2007
Dong-Won Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Composition and methods removing polysilicon
Publication number
20070037400
Publication date
Feb 15, 2007
Dong-Won Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRATE
Publication number
20070017117
Publication date
Jan 25, 2007
Samsung Electronics Co., Ltd.
Hun-Jung YI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer guides for processing semiconductor substrates
Publication number
20060260149
Publication date
Nov 23, 2006
SAMSUNG ELECTRONICS CO., LTD.
Pil-Kwon Jun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING APPARATUS AND METHOD
Publication number
20060237033
Publication date
Oct 26, 2006
Samsung Electronics Co., Ltd.
Hun-Jung Yi
B08 - CLEANING
Information
Patent Application
Apparatus and method for cleaning a semiconductor wafer
Publication number
20060231125
Publication date
Oct 19, 2006
Samsung Electronics Co., Ltd.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer guides for processing semiconductor substrates
Publication number
20060027513
Publication date
Feb 9, 2006
SAMSUNG ELECTRONICS CO., LTD.
Pil-Kwon Jun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus to dry substrates
Publication number
20060005422
Publication date
Jan 12, 2006
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for drying a wafer, and an apparatus for clean...
Publication number
20050097771
Publication date
May 12, 2005
SAMSUNG ELECTRONICS CO., LTD.
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for drying semiconductor substrates
Publication number
20050091871
Publication date
May 5, 2005
Hun-Jung Yi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for cleaning semiconductor substrates
Publication number
20050045208
Publication date
Mar 3, 2005
Sang-Oh Park
B08 - CLEANING
Information
Patent Application
Apparatus and method for cleaning semiconductor substrates
Publication number
20050039776
Publication date
Feb 24, 2005
SAMSUNG ELECTRONICS CO., LTD.
Hun-Jung Yi
B08 - CLEANING