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Taichung, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Micro electro mechanical system (MEMs) device having metal sealing...
Patent number
12,202,724
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
12,074,110
Issue date
Aug 27, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming dielectric and metal sealing layers on capping st...
Patent number
11,772,960
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Layer for buffer semiconductor device including microelectromechnic...
Patent number
11,462,478
Issue date
Oct 4, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method for the same
Patent number
10,961,114
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Particle improvement for single wafer apparatus
Patent number
9,659,794
Issue date
May 23, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Sung Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing thereof
Patent number
9,508,815
Issue date
Nov 29, 2016
Taiwan Semiconductor Manufacturing Co., Ltd
Fu-An Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for semiconductor manufacturing
Patent number
9,406,525
Issue date
Aug 2, 2016
Taiwan Semiconductor Manufacturing Company Ltd.
Pei-Wen Chi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing thereof
Patent number
9,202,809
Issue date
Dec 1, 2015
Taiwan Semiconductor Manufacturing Co., Ltd
Fu-An Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preventative maintenance aided tool for CVD chamber
Patent number
6,776,850
Issue date
Aug 17, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Miao-Cheng Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20230382719
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220367378
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20210206627
Publication date
Jul 8, 2021
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20200377362
Publication date
Dec 3, 2020
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20200381366
Publication date
Dec 3, 2020
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THEREOF
Publication number
20160056255
Publication date
Feb 25, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Fu-An LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE IMPROVEMENT FOR SINGLE WAFER APPARATUS
Publication number
20160040286
Publication date
Feb 11, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Sung HUNG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor Device And Method For Manufacturing Thereof
Publication number
20150221640
Publication date
Aug 6, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Fu-An Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SEMICONDUCTOR MANUFACTURING
Publication number
20150140829
Publication date
May 21, 2015
Taiwan Semiconductor Manufacturing company Ltd.
PEI-WEN CHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREVENTATIVE MAINTENANCE AIDED TOOL FOR CVD CHAMBER
Publication number
20030228751
Publication date
Dec 11, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Miao-Cheng Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...