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Tainan, TW
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Patents Grants
last 30 patents
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Patent Grant
Wafer cleaning apparatus and method
Patent number
12,165,887
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jieh-Chau Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus and method
Patent number
11,764,081
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Jieh-Chau Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus and method
Patent number
11,056,358
Issue date
Jul 6, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Jieh-Chau Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method of forming the same
Patent number
9,515,021
Issue date
Dec 6, 2016
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Chih Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WAFER CLEANING APPARATUS AND METHOD
Publication number
20240021446
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jieh-Chau HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND METHOD
Publication number
20190148181
Publication date
May 16, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Jieh-Chau HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming a dual damascene structure
Publication number
20080119040
Publication date
May 22, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Han Lin
H01 - BASIC ELECTRIC ELEMENTS