Hung-San Chen

Person

Petaluma, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming retaining ring with shaped surface
- Patent number 11,850,703
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface and method of forming
- Patent number 11,577,361
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Chemical mechanical polishing apparatus and methods
- Patent number 11,453,097
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 11,260,500
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Inner retaining ring and outer retaining ring for carrier head
- Patent number 11,173,579
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad having arc-shaped configuration
- Patent number 11,072,049
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Hung Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retaining ring with shaped surface
- Patent number 10,766,117
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Textured membrane for a multi-chamber carrier head
- Patent number 10,702,971
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and methods
- Patent number 10,500,694
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad configuration and chemical mechanical polishing system
- Patent number 10,207,389
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad configuration and polishing pad support
- Patent number 10,105,812
- Issue date Oct 23, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Orbital polishing with small pad
- Patent number 10,076,817
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Inner retaining ring and outer retaining ring for carrier head
- Patent number 10,022,837
- Issue date Jul 17, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with pad carrier and conditioning station
- Patent number 9,987,724
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with Shaped Surface
- Patent number 9,937,601
- Issue date Apr 10, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier for small pad for chemical mechanical polishing
- Patent number 9,873,179
- Issue date Jan 23, 2018
- Applied Materials, Inc.
- Hui Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for substrate polishing end point detection usi...
- Patent number 9,862,070
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with front side pressure control
- Patent number 9,808,906
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Modifying substrate thickness profiles
- Patent number 9,662,762
- Issue date May 30, 2017
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with selected stiffness and thickness
- Patent number 9,492,905
- Issue date Nov 15, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioning of grooving in polishing pads
- Patent number 9,486,893
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Hung Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Textured membrane for a multi-chamber carrier head
- Patent number 9,452,505
- Issue date Sep 27, 2016
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with front side pressure control
- Patent number 9,358,658
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-disk chemical mechanical polishing pad conditioners and methods
- Patent number 9,308,623
- Issue date Apr 12, 2016
- Applied Materials, Inc.
- Hung Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Side pad design for edge pedestal
- Patent number 9,254,547
- Issue date Feb 9, 2016
- Applied Materials, Inc.
- Yin Yuan
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 9,186,773
- Issue date Nov 17, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
High stiffness, anti-slip scrubber brush assembly, high-stiffness m...
- Patent number 9,119,461
- Issue date Sep 1, 2015
- Applied Materials, Inc.
- Hui Chen
- A46 - BRUSHWARE
Information Patent Grant
Monitoring retaining ring thickness and pressure control
- Patent number 9,067,295
- Issue date Jun 30, 2015
- Applied Materials, Inc.
- Sameer Deshpande
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for substrate polishing end point detection usi...
- Patent number 9,061,394
- Issue date Jun 23, 2015
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head zone boundary smoothing
- Patent number 9,050,699
- Issue date Jun 9, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE
- Publication number 20230182261
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING WITH SHAPED SURFACE AND METHOD OF FORMING
- Publication number 20220152778
- Publication date May 19, 2022
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring with Shaped Surface
- Publication number 20200398399
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Chemical Mechanical Polishing Apparatus and Methods
- Publication number 20200086452
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING PAD HAVING ARC-SHAPED CONFIGURATION
- Publication number 20190047110
- Publication date Feb 14, 2019
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- Publication number 20180304441
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring With Shaped Surface
- Publication number 20180185979
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS
- Publication number 20170297163
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Rajeev Bajaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER FOR SMALL PAD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20170203405
- Publication date Jul 20, 2017
- Applied Materials, Inc.
- Hui Chen
- B24 - GRINDING POLISHING
Information Patent Application
TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD
- Publication number 20170001282
- Publication date Jan 5, 2017
- Applied Materials, Inc.
- Jeonghoon Oh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20160279756
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- Publication number 20160082571
- Publication date Mar 24, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring With Shaped Surface
- Publication number 20160045997
- Publication date Feb 18, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING PAD CONFIGURATION AND POLISHING PAD SUPPORT
- Publication number 20160016281
- Publication date Jan 21, 2016
- Hung Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING PAD CONFIGURATION AND CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20160016282
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
ORBITAL POLISHING WITH SMALL PAD
- Publication number 20160016280
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODIFYING SUBSTRATE THICKNESS PROFILES
- Publication number 20160016279
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Jay Gurusamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING SYSTEM WITH PAD CARRIER AND CONDITIONING STATION
- Publication number 20160016284
- Publication date Jan 21, 2016
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Application
CONDITIONING OF GROOVING IN POLISHING PADS
- Publication number 20150336236
- Publication date Nov 26, 2015
- Applied Materials, Inc.
- Hung Chen
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Application
RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS
- Publication number 20150209930
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION
- Publication number 20150050105
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Dan Zhang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD
- Publication number 20150038065
- Publication date Feb 5, 2015
- Applied Materials, Inc.
- Jeonghoon Oh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CHEMICAL MECHANICAL POLISHING RETAINING RING METHODS AND APPARATUS
- Publication number 20150021498
- Publication date Jan 22, 2015
- Applied Materials, Inc.
- Samuel Hsu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTI-DISK CHEMICAL MECHANICAL POLISHING PAD CONDITIONERS AND METHODS
- Publication number 20140315473
- Publication date Oct 23, 2014
- Hung Chen
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR A NON-CONTACT EDGE POLISHING MODULE USING...
- Publication number 20140308813
- Publication date Oct 16, 2014
- Applied Materials, Inc.
- Samuel Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING PAD CONDITIONER PIVOT POINT
- Publication number 20140273767
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20140273765
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20140273766
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR CONDITIONING OF CHEMICAL MECHANICAL POLIS...
- Publication number 20140206263
- Publication date Jul 24, 2014
- Rajeev BAJAJ
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS
- Publication number 20140199840
- Publication date Jul 17, 2014
- Rajeev Bajaj
- H01 - BASIC ELECTRIC ELEMENTS

Hung-San Chen

Person

Patents Grantslast 30 patents

Method of forming retaining ring with shaped surface

Retaining ring with shaped surface and method of forming

Chemical mechanical polishing apparatus and methods

Retaining ring with shaped surface

Inner retaining ring and outer retaining ring for carrier head

Polishing pad having arc-shaped configuration

Retaining ring with shaped surface

Textured membrane for a multi-chamber carrier head

Chemical mechanical polishing apparatus and methods

Polishing pad configuration and chemical mechanical polishing system

Polishing pad configuration and polishing pad support

Orbital polishing with small pad

Inner retaining ring and outer retaining ring for carrier head

Polishing system with pad carrier and conditioning station

Retaining ring with Shaped Surface

Carrier for small pad for chemical mechanical polishing

Systems and methods for substrate polishing end point detection usi...

Polishing system with front side pressure control

Modifying substrate thickness profiles

Retaining ring with selected stiffness and thickness

Conditioning of grooving in polishing pads

Textured membrane for a multi-chamber carrier head

Polishing system with front side pressure control

Multi-disk chemical mechanical polishing pad conditioners and methods

Side pad design for edge pedestal

Retaining ring with shaped surface

High stiffness, anti-slip scrubber brush assembly, high-stiffness m...

Monitoring retaining ring thickness and pressure control

Systems and methods for substrate polishing end point detection usi...

Polishing head zone boundary smoothing

Patents Applicationslast 30 patents

METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE

RETAINING RING WITH SHAPED SURFACE AND METHOD OF FORMING

Retaining Ring with Shaped Surface

Chemical Mechanical Polishing Apparatus and Methods

POLISHING PAD HAVING ARC-SHAPED CONFIGURATION

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD

Retaining Ring With Shaped Surface

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS

CARRIER FOR SMALL PAD FOR CHEMICAL MECHANICAL POLISHING

TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD

Polishing System with Front Side Pressure Control

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD

Retaining Ring With Shaped Surface

POLISHING PAD CONFIGURATION AND POLISHING PAD SUPPORT

POLISHING PAD CONFIGURATION AND CHEMICAL MECHANICAL POLISHING SYSTEM

ORBITAL POLISHING WITH SMALL PAD

MODIFYING SUBSTRATE THICKNESS PROFILES

POLISHING SYSTEM WITH PAD CARRIER AND CONDITIONING STATION

CONDITIONING OF GROOVING IN POLISHING PADS

RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS

VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION

TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD

CHEMICAL MECHANICAL POLISHING RETAINING RING METHODS AND APPARATUS

MULTI-DISK CHEMICAL MECHANICAL POLISHING PAD CONDITIONERS AND METHODS

METHODS AND APPARATUS FOR A NON-CONTACT EDGE POLISHING MODULE USING...

POLISHING PAD CONDITIONER PIVOT POINT

Polishing System with Front Side Pressure Control

Polishing System with Front Side Pressure Control

METHODS AND APPARATUS FOR CONDITIONING OF CHEMICAL MECHANICAL POLIS...

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS