Hung-Tai Tsao

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning spin coater
- Patent number 8,091,504
- Issue date Jan 10, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen Hsieh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
MEMS PACKAGE
- Publication number 20100109103
- Publication date May 6, 2010
- Windtop Technology Corp., a Taiwan Corporation
- Hung-Chang Tsao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for cleaning spin coater
- Publication number 20080066786
- Publication date Mar 20, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen Hsieh
- H01 - BASIC ELECTRIC ELEMENTS