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Patents Grants
last 30 patents
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Patent Grant
Single photoresist approach for high challenge photo process
Patent number
8,778,602
Issue date
Jul 15, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for providing phase shift mask passivation layer
Patent number
7,727,682
Issue date
Jun 1, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SINGLE PHOTORESIST APPROACH FOR HIGH CHALLENGE PHOTO PROCESS
Publication number
20110070546
Publication date
Mar 24, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Providing Phase Shift Mask Passivation Layer
Publication number
20080233486
Publication date
Sep 25, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY