Hung-Yu Kuo

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Hsin-Chu Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
Multi-conditioner arrangement of a CMP system
- Patent number 6,390,902
- Issue date May 21, 2002
- United Microelectronics Corp.
- Ruoh-Haw Chang
- B24 - GRINDING POLISHING