Hunglin Chen

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method of detecting and measuring contact alignment shift relative...
- Patent number 9,269,639
- Issue date Feb 23, 2016
- Shanghai Huali Microelectronics Corporation
- Rongwei Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for monitoring alignment between contact holes and polycryst...
- Patent number 9,080,863
- Issue date Jul 14, 2015
- SHANGAI HUALI MICROELECTRONICS CORPORATION
- Qiliang Ni
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting misalignment of polysilicon gate
- Patent number 8,987,013
- Issue date Mar 24, 2015
- Shanghai Huali Microelectronics Corporation
- Rongwei Fan
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting the circular uniformity of the semiconductor ci...
- Patent number 8,865,482
- Issue date Oct 21, 2014
- Shanghai Huali Microelectronics Corporation
- Kai Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Measurement of lateral diffusion of implanted ions in doped well re...
- Patent number 8,658,438
- Issue date Feb 25, 2014
- Shanghai Huali Microelectronics Corporation
- Rongwei Fan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PREDICTING YIELD OF SEMICONDUCTOR DEVICES
- Publication number 20220172070
- Publication date Jun 2, 2022
- Shanghai Huali Integrated Circuit Corporation
- Shanshan CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of Inspecting Misalignment of Polysilicon Gate
- Publication number 20150004723
- Publication date Jan 1, 2015
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Rongwei FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING AND MEASURING CONTACT ALIGNMENT SHIFT RELATIVE...
- Publication number 20140377888
- Publication date Dec 25, 2014
- Rongwei Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING THE CIRCULAR UNIFORMITY OF THE SEMICONDUCTOR CI...
- Publication number 20140127835
- Publication date May 8, 2014
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Kai WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT OF LATERAL DIFFUSION OF IMPLANTED IONS IN DOPED WELL RE...
- Publication number 20140011304
- Publication date Jan 9, 2014
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Rongwei FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MONITORING ALIGNMENT BETWEEN CONTACT HOLES AND POLYCRYST...
- Publication number 20130342842
- Publication date Dec 26, 2013
- Shangai Huali Microelectronics Corporation
- Qiliang Ni
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MONITORING DEVICES IN SEMICONDUCTOR PROCESS
- Publication number 20130137196
- Publication date May 30, 2013
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Hunglin CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR YIELD MANAGEMENT SYSTEM
- Publication number 20130138239
- Publication date May 30, 2013
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Hunglin CHEN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method for Preventing Wafer Edge Peeling in Metal Wiring Process
- Publication number 20080124891
- Publication date May 29, 2008
- Semiconductor Manufacturing International (Shanghai) Corporation
- Kegang Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Hunglin Chen

Person

Patents Grantslast 30 patents

Method of detecting and measuring contact alignment shift relative...

Method for monitoring alignment between contact holes and polycryst...

Method of inspecting misalignment of polysilicon gate

Method of detecting the circular uniformity of the semiconductor ci...

Measurement of lateral diffusion of implanted ions in doped well re...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PREDICTING YIELD OF SEMICONDUCTOR DEVICES

Method of Inspecting Misalignment of Polysilicon Gate

METHOD OF DETECTING AND MEASURING CONTACT ALIGNMENT SHIFT RELATIVE...

METHOD OF DETECTING THE CIRCULAR UNIFORMITY OF THE SEMICONDUCTOR CI...

MEASUREMENT OF LATERAL DIFFUSION OF IMPLANTED IONS IN DOPED WELL RE...

METHOD FOR MONITORING ALIGNMENT BETWEEN CONTACT HOLES AND POLYCRYST...

METHOD FOR MONITORING DEVICES IN SEMICONDUCTOR PROCESS

SEMICONDUCTOR YIELD MANAGEMENT SYSTEM

Method for Preventing Wafer Edge Peeling in Metal Wiring Process