Hungyueh Lu

Follow

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Dry clean method instead of traditional wet clean after metal etch
- Patent number 6,526,996
- Issue date Mar 4, 2003
- Promos Technologies, Inc.
- Hong-Long Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-cleaning method of a via etching process
- Patent number 6,500,766
- Issue date Dec 31, 2002
- ProMos Technologies Inc.
- Hungyueh Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Dry clean method instead of traditional wet clean after metal etch
- Publication number 20030104697
- Publication date Jun 5, 2003
- ProMOS Technologies, Inc.
- Hong-Long Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post-cleaning method of a via etching process
- Publication number 20020096494
- Publication date Jul 25, 2002
- ProMos Technologies Inc.
- Hungyueh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post-cleaning method of a via etching process
- Publication number 20020081859
- Publication date Jun 27, 2002
- Hungyueh Lu
- H01 - BASIC ELECTRIC ELEMENTS