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Suwon-si, KR
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last 30 patents
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Patent Grant
Optical apparatus
Patent number
8,416,509
Issue date
Apr 9, 2013
Samsung Electronics Co., Ltd.
HunJung Yi
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
PROCESS MONITORING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS IN...
Publication number
20110222058
Publication date
Sep 15, 2011
SAMSUNG ELECTRONICS CO., LTD.
Se-Yeon KIM
G01 - MEASURING TESTING
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Patent Application
OPTICAL APPARATUS FOR PLASMA
Publication number
20100200767
Publication date
Aug 12, 2010
HunJung YI
G02 - OPTICS