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Hury Ming Chong
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Singapore, SG
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last 30 patents
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Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
Patent number
7,655,388
Issue date
Feb 2, 2010
Chartered Semiconductor Manufacturing, Ltd.
Sia Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Mask and method to pattern chromeless phase lithography contact hole
Publication number
20060147813
Publication date
Jul 6, 2006
Sya Kim Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY