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Huutri Dao
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma generation source employing dielectric conduit assemblies ha...
Patent number
9,155,184
Issue date
Oct 6, 2015
Applied Materials, Inc.
Siu Tang Ng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for etching high aspect ratio features
Patent number
8,475,625
Issue date
Jul 2, 2013
Applied Materials, Inc.
Sharma Pamarthy
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SINGLE RING DESIGN FOR HIGH YIELD, SUBSTRATE EXTREME EDGE DEFECT RE...
Publication number
20160099162
Publication date
Apr 7, 2016
Applied Materials, Inc.
Siu Tang NG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION SOURCE EMPLOYING DIELECTRIC CONDUIT ASSEMBLIES HA...
Publication number
20150137681
Publication date
May 21, 2015
Applied Materials, Inc.
Siu Tang NG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
Publication number
20070256785
Publication date
Nov 8, 2007
Sharma Pamarthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Nozzle for introduction of reactive species in remote plasma cleani...
Publication number
20020179247
Publication date
Dec 5, 2002
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Remote plasma cleaning of pumpstack components of a reactor chamber
Publication number
20020144706
Publication date
Oct 10, 2002
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...