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Hyanjung LEE
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Hwaseong-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Lift apparatus and substrate processing apparatus including the same
Patent number
11,984,344
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Byeongsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and substrate processing apparatus including th...
Patent number
11,404,252
Issue date
Aug 2, 2022
Samsung Electronics Co., Ltd.
Byeongsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
LIFT APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20210159112
Publication date
May 27, 2021
Samsung Electronics Co., Ltd.
Byeongsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
Publication number
20210111007
Publication date
Apr 15, 2021
Samsung Electronics Co., Ltd.
Byeongsang KIM
H01 - BASIC ELECTRIC ELEMENTS