Hyeon-Ill Um

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Seongnam-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) el...
- Patent number 7,208,878
- Issue date Apr 24, 2007
- Samsung Electronics Co., Ltd.
- Jai-kwang Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufac...
- Patent number 7,119,489
- Issue date Oct 10, 2006
- Samsung Electronics Co., Ltd.
- Jai-kwang Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus for forming a metal film using a magnetic field
- Patent number 6,723,215
- Issue date Apr 20, 2004
- Samsung Electronics Co., Ltd.
- Young-Kyou Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for cleaning a thin film forming apparatus and method for fo...
- Publication number 20070184188
- Publication date Aug 9, 2007
- Young-Sun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) el...
- Publication number 20060113916
- Publication date Jun 1, 2006
- Samsung Electronics Co., Ltd.
- Jai-kwang Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufac...
- Publication number 20030178299
- Publication date Sep 25, 2003
- SAMSUNG ELECTRONICS CO., LTD.
- Jai-kwang Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering apparatus for forming a metal film using a magnetic field
- Publication number 20030052001
- Publication date Mar 20, 2003
- Young-Kyou Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...