Hyeon Taeg Gim

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Gyeongsangnam-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method and chamber for inductively coupled plasma processing for cy...
- Patent number 8,591,711
- Issue date Nov 26, 2013
- Korea Electrotechnology Research Institute
- Sung Il Chung
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and Chamber for Inductively Coupled Plasma Processing for Cy...
- Publication number 20110253674
- Publication date Oct 20, 2011
- New Optics, Ltd.
- Sung Il Chung
- H01 - BASIC ELECTRIC ELEMENTS