Hyeongmo KANG

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 12,020,903
- Issue date Jun 25, 2024
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 11,545,341
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD
- Publication number 20240234094
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Changho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD
- Publication number 20240136155
- Publication date Apr 25, 2024
- Samsung Electronics Co., Ltd.
- Changho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20230084124
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20210104382
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS