Hyman Lam

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE48994
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 11,133,155
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas feedthrough assembly
- Patent number 10,640,870
- Issue date May 5, 2020
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 10,453,657
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE47440
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Apparatus for providing plasma to a process chamber
- Patent number 9,982,343
- Issue date May 29, 2018
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber gas delivery system with hot-swappable ampoule
- Patent number 9,447,497
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition chambers with UV treatment and methods of use
- Patent number 9,252,024
- Issue date Feb 2, 2016
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number 9,109,754
- Issue date Aug 18, 2015
- Applied Materials, Inc.
- Joseph Yudovsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 9,017,776
- Issue date Apr 28, 2015
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber lid design with built-in plasma source for short li...
- Patent number 9,004,006
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,747,556
- Issue date Jun 10, 2014
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,291,857
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,293,015
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER MATCHING AND CALIBRATION
- Publication number 20220005713
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Xuesong Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT
- Publication number 20200020509
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- DAPING YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT
- Publication number 20180012732
- Publication date Jan 11, 2018
- DAPING YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FEEDTHROUGH ASSEMBLY
- Publication number 20170306488
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Daping YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SELECTIVELY SEALING A GAS FEEDTHROUGH
- Publication number 20160326648
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION CHAMBERS WITH UV TREATMENT AND METHODS OF USE
- Publication number 20140342555
- Publication date Nov 20, 2014
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing Chamber Gas Delivery System with Hot-Swappable Ampoule
- Publication number 20140261733
- Publication date Sep 18, 2014
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus And Methods For Symmetrical Gas Distribution With High Pu...
- Publication number 20140174362
- Publication date Jun 26, 2014
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER
- Publication number 20140165911
- Publication date Jun 19, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER
- Publication number 20140165912
- Publication date Jun 19, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR CHEMICAL DELIVERY SYSTEM
- Publication number 20140137961
- Publication date May 22, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20140087091
- Publication date Mar 27, 2014
- Applied Materials, Inc.
- Hyman W.H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Providing Uniform Flow of Gas
- Publication number 20130098477
- Publication date Apr 25, 2013
- Joseph Yudovsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20130008984
- Publication date Jan 10, 2013
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20120000422
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER LID DESIGN WITH BUILT-IN PLASMA SOURCE FOR SHORT LI...
- Publication number 20110265721
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20100003406
- Publication date Jan 7, 2010
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Apparatus and method for providing uniform flow of gas

Apparatus for depositing metal films with plasma treatment

Gas feedthrough assembly

Apparatus for depositing metal films with plasma treatment

Apparatus and method for providing uniform flow of gas

Apparatus for providing plasma to a process chamber

Processing chamber gas delivery system with hot-swappable ampoule

Deposition chambers with UV treatment and methods of use

Apparatus and method for providing uniform flow of gas

Apparatuses and methods for atomic layer deposition

Process chamber lid design with built-in plasma source for short li...

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Patents Applicationslast 30 patents

CHAMBER MATCHING AND CALIBRATION

APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT

APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT

GAS FEEDTHROUGH ASSEMBLY

APPARATUS FOR SELECTIVELY SEALING A GAS FEEDTHROUGH

DEPOSITION CHAMBERS WITH UV TREATMENT AND METHODS OF USE

Processing Chamber Gas Delivery System with Hot-Swappable Ampoule

Apparatus And Methods For Symmetrical Gas Distribution With High Pu...

APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER

APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER

MODULAR CHEMICAL DELIVERY SYSTEM

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

Apparatus and Method for Providing Uniform Flow of Gas

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

PROCESS CHAMBER LID DESIGN WITH BUILT-IN PLASMA SOURCE FOR SHORT LI...

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION