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Hyojin PARK
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Hwaseong-si, KR
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last 30 patents
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Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
Publication number
20240395501
Publication date
Nov 28, 2024
Samsung Electronics Co., Ltd.
Hyojin PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR CLEANING WAFER
Publication number
20230402299
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
Hyojin Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20230209814
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Hyeonok Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD USING THE...
Publication number
20230052061
Publication date
Feb 16, 2023
Samsung Electronics Co., Ltd.
Hyojin PARK
B24 - GRINDING POLISHING