Hyoseok Yang

Person

  • Sunnyvale, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Cleaning of deposition device by injecting cleaning gas into deposi...

    • Patent number 9,546,423
    • Issue date Jan 17, 2017
    • Veeco ALD Inc.
    • Sang In Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Radical reactor with inverted orientation

    • Patent number 9,435,030
    • Issue date Sep 6, 2016
    • Veeco ALD Inc.
    • Daniel Ho Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas injection plate

    • Patent number D732092
    • Issue date Jun 16, 2015
    • Veeco ALD Inc.
    • Samuel S. Pak
    • D15 - Machines not elsewhere specified
  • Information Patent Grant

    Gas tube assembly

    • Patent number D732093
    • Issue date Jun 16, 2015
    • Veeco ALD Inc.
    • Samuel S. Pak
    • D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents