Hyoung Kyu SON

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supplying unit of substrate treating apparatus
- Patent number 11,408,071
- Issue date Aug 9, 2022
- Semes Co., Ltd.
- Hyoung Kyu Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having gate slit opening and closing apparatus
- Patent number 8,834,673
- Issue date Sep 16, 2014
- ADP Engineering Co., Ltd.
- Hyoung Kyu Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin driving device and a flat panel display manufacturing appa...
- Patent number 7,988,817
- Issue date Aug 2, 2011
- ADP Engineering Co., Ltd.
- Hyoung Kyu Son
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for measuring chuck attachment force
- Patent number 7,770,478
- Issue date Aug 10, 2010
- ADP Engineering Co., Ltd.
- Hyoung Kyu Son
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND PLASMA DENSITY CONTROL METHOD
- Publication number 20240203690
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Hyoung Kyu SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREAT...
- Publication number 20230215706
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Yoon Seok CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230133714
- Publication date May 4, 2023
- SEMES CO., LTD.
- Dong Uk KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND ASSEMBLY FOR DISTRIBUTING GAS
- Publication number 20220208516
- Publication date Jun 30, 2022
- SEMES CO., LTD.
- Hyoung Kyu SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLYING UNIT OF SUBSTRATE TREATING APPARATUS
- Publication number 20200277702
- Publication date Sep 3, 2020
- SEMES CO., LTD.
- Hyoung Kyu SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AMD METHOD FOR MEASURING CHUCK ATTACHMENT FORCE
- Publication number 20090107250
- Publication date Apr 30, 2009
- ADP Engineering Co., Ltd.
- Hyoung Kyu SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS HAVING ELECTRODE MEMBER
- Publication number 20090071524
- Publication date Mar 19, 2009
- Hyoung-Kyu SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER HAVING GATE SLIT OPENING AND CLOSING APPARATUS
- Publication number 20080110568
- Publication date May 15, 2008
- ADP Engineering Co., Ltd.
- Hyoung Kyu SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN DRIVING DEVICE AND A FLAT PANEL DISPLAY MANUFACTURING APPA...
- Publication number 20080110397
- Publication date May 15, 2008
- Hyoung Kyu SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MEASURING CHUCK ATTACHMENT FORCE
- Publication number 20080108154
- Publication date May 8, 2008
- Hyoung Kyu Son
- H01 - BASIC ELECTRIC ELEMENTS

Hyoung Kyu SON

Person

Patents Grantslast 30 patents

Gas supplying unit of substrate treating apparatus

Process chamber having gate slit opening and closing apparatus

Lift pin driving device and a flat panel display manufacturing appa...

Apparatus and method for measuring chuck attachment force

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS AND PLASMA DENSITY CONTROL METHOD

LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREAT...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

APPARATUS FOR TREATING SUBSTRATE AND ASSEMBLY FOR DISTRIBUTING GAS

GAS SUPPLYING UNIT OF SUBSTRATE TREATING APPARATUS

APPARATUS AMD METHOD FOR MEASURING CHUCK ATTACHMENT FORCE

SUBSTRATE PROCESSING APPARATUS HAVING ELECTRODE MEMBER

PROCESS CHAMBER HAVING GATE SLIT OPENING AND CLOSING APPARATUS

LIFT PIN DRIVING DEVICE AND A FLAT PANEL DISPLAY MANUFACTURING APPA...

APPARATUS AND METHOD FOR MEASURING CHUCK ATTACHMENT FORCE