Hyun-Woo Lee

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus
- Patent number 8,243,259
- Issue date Aug 14, 2012
- ASML Netherlands B.V.
- Vitally Prosyentsov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for CD determination using an alignment sensor of...
- Patent number 7,545,520
- Issue date Jun 9, 2009
- ASML Netherlands B.V.
- Hyun-Woo Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20110028004
- Publication date Feb 3, 2011
- ASML NETHERLANDS B.V.
- Jiun-Cheng Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20090316122
- Publication date Dec 24, 2009
- ASML NETHERLANDS B.V.
- Vitaliy Prosyentsov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for CD determination using an alignment sensor of...
- Publication number 20080111995
- Publication date May 15, 2008
- ASML NETHERLANDS B.V.
- Hyun-Woo Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY