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Hyun Woo Tak
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Yongin-si, KR
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last 30 patents
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Patent Grant
Plasma source and plasma generation apparatus using the same
Patent number
11,127,570
Issue date
Sep 21, 2021
Research & Business Foundation Sungkyunkwan University
Geun Young Yeom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for generating plasma and apparatus for treating substrat...
Patent number
10,784,082
Issue date
Sep 22, 2020
Research & Business Foundation Sungkyunkwan University
Geun Young Yeom
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCE...
Publication number
20240136187
Publication date
Apr 25, 2024
Research & Business Foundation Sungkyunkwan University
Geun Young YEOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING PROCESSING APPARATUS AND ETCHING PROCESSING METHOD
Publication number
20230395386
Publication date
Dec 7, 2023
Daejeon University Industry-University Cooperation Foundation
Kyong Nam KIM
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS FOR GENERATING PLASMA AND APPARATUS FOR TREATING SUBSTRAT...
Publication number
20190252153
Publication date
Aug 15, 2019
Research & Business Foundation Sungkyunkwan University
Geun Young YEOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCE AND PLASMA GENERATION APPARATUS USING THE SAME
Publication number
20190221404
Publication date
Jul 18, 2019
Research & Business Foundation Sungkyunkwan University
Geun Young YEOM
H01 - BASIC ELECTRIC ELEMENTS