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Hyunbae Kim
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Yongin-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Voltage waveform generator, wafer processing apparatus and plasma p...
Patent number
12,002,651
Issue date
Jun 4, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable frequency and non-sinusoidal power generator using double...
Patent number
11,705,306
Issue date
Jul 18, 2023
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VOLTAGE WAVEFORM CONTROLLING METHOD, SUBSTRATE PROCESSING METHOD, A...
Publication number
20240170255
Publication date
May 23, 2024
ASMSUNG ELECTRONICS CO., LTD.
Hyong seo YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...
Publication number
20240128055
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE POWER SUPPLY APPARATUS AND PLASMA ETCHING EQUIPMENT HA...
Publication number
20230075642
Publication date
Mar 9, 2023
Samsung Electronics Co., Ltd.
Jihwan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE FREQUENCY AND NON-SINUSOIDAL POWER GENERATOR USING DOUBLE...
Publication number
20220262599
Publication date
Aug 18, 2022
Samsung Electronics Co., Ltd.
Hyunbae KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VOLTAGE WAVEFORM GENERATOR, WAFER PROCESSING APPARATUS AND PLASMA P...
Publication number
20210407769
Publication date
Dec 30, 2021
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS