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Hyungjun Kim
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Pohang, KR
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last 30 patents
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Patent Application
METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON PO...
Publication number
20120301706
Publication date
Nov 29, 2012
International Business Machines Corporation
Andrew J. Kellock
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON PO...
Publication number
20100055442
Publication date
Mar 4, 2010
International Business Machines Corporation
Andrew J. Kellock
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...