Hyunjong Shim

Follow

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
- Patent number 10,431,458
- Issue date Oct 1, 2019
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
- Patent number 9,543,148
- Issue date Jan 10, 2017
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASK SHRINK LAYER FOR HIGH ASPECT RATIO DIELECTRIC ETCH
- Publication number 20170076945
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS