Hyunjong Shim

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Pleasanton, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMEN...
- Publication number 20080023144
- Publication date Jan 31, 2008
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric etch method with high source and low bombardment plasma...
- Publication number 20060118519
- Publication date Jun 8, 2006
- Applied Materials Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS