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Hyunjoon BANG
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Yamanashi, JP
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last 30 patents
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Patent Grant
Plasma purge method
Patent number
11,725,276
Issue date
Aug 15, 2023
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
PLASMA PURGE METHOD
Publication number
20220081766
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
B08 - CLEANING
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Patent Application
PLASMA PURGE METHOD
Publication number
20220081764
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS