Hyunsoo Chun

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Valve structure and substrate processing apparatus including the same
- Patent number 11,948,814
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SLIT VALVE APPARATUS
- Publication number 20250172212
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Hyungho Kim
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240213053
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PH MONITORING SYSTEMS HAVING SENSOR MODULES
- Publication number 20230296550
- Publication date Sep 21, 2023
- Samsung Electronics Co., Ltd.
- Sunhwan PARK
- G01 - MEASURING TESTING
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230130512
- Publication date Apr 27, 2023
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS