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I-Chun Eugenia Liu
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Apparatus for distributing gases in a chemical vapor deposition system
Patent number
6,495,233
Issue date
Dec 17, 2002
Applied Materials, Inc.
Inna Shmurun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...