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I. Roger Oliver
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Gisborne, NZ
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Patents Grants
last 30 patents
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Patent Grant
EUV light source
Patent number
7,323,703
Issue date
Jan 29, 2008
Cymer, Inc.
I. Roger Oliver
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Discharge produced plasma EUV light source
Patent number
7,291,853
Issue date
Nov 6, 2007
Cymer, Inc.
Igor V. Fomenkov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
EUV light source
Publication number
20070158596
Publication date
Jul 12, 2007
I. Roger Oliver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge produced plasma EUV light source
Publication number
20070023711
Publication date
Feb 1, 2007
Igor V. Fomenkov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR