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I'adahiro Ohmi
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Sendai-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma process apparatus and its processor
Patent number
7,478,609
Issue date
Jan 20, 2009
Sharp Kabushiki Kaisha
Naoko Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma process apparatus and its processor
Publication number
20050011455
Publication date
Jan 20, 2005
Naoko Yamamoto
H01 - BASIC ELECTRIC ELEMENTS