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Ian H. Lewin
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Forest Row, GB
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last 30 patents
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Patent Grant
Electrostatic chuck
Patent number
4,665,463
Issue date
May 12, 1987
U.S. Philips Corporation
Rodney Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck loading
Patent number
4,554,611
Issue date
Nov 19, 1985
U.S. Philips Corporation
Ian H. Lewin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
4,502,094
Issue date
Feb 26, 1985
U.S. Philips Corporation
Ian H. Lewin
H01 - BASIC ELECTRIC ELEMENTS