Ian J. Morey

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Unique process chemistry for etching organic low-k materials
- Patent number 6,841,483
- Issue date Jan 11, 2005
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-etch photoresist strip with O2 and NH3 for organosilicate glas...
- Patent number 6,777,344
- Issue date Aug 17, 2004
- Lam Research Corporation
- Rao V. Annapragada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post etch photoresist strip with hydrogen for organosilicate glass...
- Patent number 6,426,304
- Issue date Jul 30, 2002
- Lam Research Corporation
- Ting Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for etching dual damascene structures in organosilicate glass
- Patent number 6,410,437
- Issue date Jun 25, 2002
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Unique process chemistry for etching organic low-k materials
- Publication number 20020111036
- Publication date Aug 15, 2002
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post-etch photoresist strip with O2 and NH3 for organosilicate glas...
- Publication number 20020111041
- Publication date Aug 15, 2002
- Lam Research Corporation
- Rao V. Annapragada
- H01 - BASIC ELECTRIC ELEMENTS