Ian KENWORTHY

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor and adjuster for a consumable
- Patent number 10,985,078
- Issue date Apr 20, 2021
- Lam Research Corporation
- Ian Kenworthy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,665,435
- Issue date May 26, 2020
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,395,902
- Issue date Aug 27, 2019
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 10,332,729
- Issue date Jun 25, 2019
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 10,074,521
- Issue date Sep 11, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,049,862
- Issue date Aug 14, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution showerhead for inductively coupled plasma etch rea...
- Patent number 9,934,979
- Issue date Apr 3, 2018
- Lam Research Corporation
- Michael Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,922,804
- Issue date Mar 20, 2018
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for gas delivery system
- Patent number 9,689,533
- Issue date Jun 27, 2017
- Lam Research Corporation
- Ian Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution showerhead for inductively coupled plasma etch rea...
- Patent number 9,099,398
- Issue date Aug 4, 2015
- Lam Research Corporation
- Michael Kang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 9,076,634
- Issue date Jul 7, 2015
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,058,960
- Issue date Jun 16, 2015
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for gas delivery system
- Patent number 8,852,685
- Issue date Oct 7, 2014
- Lam Research Corporation
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas distribution showerhead for inductively coupled plasma etch rea...
- Patent number 8,562,785
- Issue date Oct 22, 2013
- Lam Research Corporation
- Michael Kang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Edge rings for electrostatic chucks
- Patent number 8,469,368
- Issue date Jun 25, 2013
- Lam Research Corporation
- Ian Jared Kenworthy
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Aluminum-plated components of semiconductor material and methods of...
- Patent number 8,282,987
- Issue date Oct 9, 2012
- Lam Research Corporation
- Ian J. Kenworthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum-plated components of semiconductor material processing app...
- Patent number 8,128,750
- Issue date Mar 6, 2012
- Lam Research Corporation
- Ian J. Kenworthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20190371579
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20180323044
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20180174804
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SENSOR AND ADJUSTER FOR A CONSUMABLE
- Publication number 20170133283
- Publication date May 11, 2017
- LAM RESEARCH CORPORATION
- Ian KENWORTHY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20160307743
- Publication date Oct 20, 2016
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...
- Publication number 20150318147
- Publication date Nov 5, 2015
- LAM RESEARCH CORPORATION
- Michael KANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20150279621
- Publication date Oct 1, 2015
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20150243487
- Publication date Aug 27, 2015
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20140366968
- Publication date Dec 18, 2014
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...
- Publication number 20140065827
- Publication date Mar 6, 2014
- LAM RESEARCH CORPORATION
- Michael Kang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20130299605
- Publication date Nov 14, 2013
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING
- Publication number 20130264309
- Publication date Oct 10, 2013
- Ian J. Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...
- Publication number 20120309204
- Publication date Dec 6, 2012
- LAM RESEARCH CORPORATION
- Michael Kang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ALUMINUM-PLATED COMPONENTS OF SEMICONDUCTOR MATERIAL PROCESSING APP...
- Publication number 20120132532
- Publication date May 31, 2012
- LAM RESEARCH CORPORATION
- Ian J. Kenworthy
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20110259519
- Publication date Oct 27, 2011
- LAM RESEARCH CORPORATION
- Ian Kenworthy
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20110056626
- Publication date Mar 10, 2011
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RINGS FOR ELECTROSTATIC CHUCKS
- Publication number 20100044974
- Publication date Feb 25, 2010
- LAM RESEARCH CORPORATION
- Ian Jared Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aluminum-plated components of semiconductor material processing app...
- Publication number 20080241517
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Ian J. Kenworthy
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Ian KENWORTHY

Person

Patents Grantslast 30 patents

Sensor and adjuster for a consumable

Chamber with vertical support stem for symmetric conductance and RF...

Chamber with vertical support stem for symmetric conductance and RF...

Compression member for use in showerhead electrode assembly

Replaceable upper chamber parts of plasma processing apparatus

Chamber with vertical support stem for symmetric conductance and RF...

Gas distribution showerhead for inductively coupled plasma etch rea...

Compression member for use in showerhead electrode assembly

Coating method for gas delivery system

Gas distribution showerhead for inductively coupled plasma etch rea...

Replaceable upper chamber parts of plasma processing apparatus

Compression member for use in showerhead electrode assembly

Coating method for gas delivery system

Gas distribution showerhead for inductively coupled plasma etch rea...

Edge rings for electrostatic chucks

Aluminum-plated components of semiconductor material and methods of...

Aluminum-plated components of semiconductor material processing app...

Patents Applicationslast 30 patents

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

SENSOR AND ADJUSTER FOR A CONSUMABLE

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

COATING METHOD FOR GAS DELIVERY SYSTEM

GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING

GAS DISTRIBUTION SHOWERHEAD FOR INDUCTIVELY COUPLED PLASMA ETCH REA...

ALUMINUM-PLATED COMPONENTS OF SEMICONDUCTOR MATERIAL PROCESSING APP...

COATING METHOD FOR GAS DELIVERY SYSTEM

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

EDGE RINGS FOR ELECTROSTATIC CHUCKS

Aluminum-plated components of semiconductor material processing app...