Ian R. Smith

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,933,016
- Issue date Apr 26, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,876,440
- Issue date Jan 25, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,663,753
- Issue date Feb 16, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Electrical test method and apparatus
- Patent number 7,659,126
- Issue date Feb 9, 2010
- KLA-Tencor Technologies Corporation
- Ian Robert Smith
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,564,557
- Issue date Jul 21, 2009
- KLA-Tencor Technologies Corp.
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,433,040
- Issue date Oct 7, 2008
- KLA-Tencor Technologies Corp.
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,385,699
- Issue date Jun 10, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,379,183
- Issue date May 27, 2008
- KLA-Tencor Technologies Corp.
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Calibration standards and methods
- Patent number 7,361,941
- Issue date Apr 22, 2008
- KLA-Tencor Technologies Corporation
- Gian F. Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,317,531
- Issue date Jan 8, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,301,634
- Issue date Nov 27, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,298,481
- Issue date Nov 20, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,289,213
- Issue date Oct 30, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,280,212
- Issue date Oct 9, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,242,477
- Issue date Jul 10, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Methods for forming a calibration standard and calibration standard...
- Patent number 7,027,146
- Issue date Apr 11, 2006
- KLA-Tencor Technologies Corp.
- Ian Smith
- G01 - MEASURING TESTING
Information Patent Grant
Power assisted automatic supervised classifier creation tool for se...
- Patent number 6,999,614
- Issue date Feb 14, 2006
- KLA-Tencor Corporation
- David Bakker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology system using optical phase
- Patent number 6,710,876
- Issue date Mar 23, 2004
- KLA-Tencor Technologies Corporation
- Mehrdad Nikoonahad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Submicron dimensional calibration standards and methods of manufact...
- Patent number 6,646,737
- Issue date Nov 11, 2003
- KLA Tencor Technologies
- Marco Tortonese
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for scanning microscope
- Patent number 6,590,703
- Issue date Jul 8, 2003
- ThermoMicroscopes Corporation
- Sang-Il Park
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope with scan correction
- Patent number 6,265,718
- Issue date Jul 24, 2001
- ThermoMicroscopes, Corp.
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with multimode head
- Patent number 6,130,427
- Issue date Oct 10, 2000
- Park Scientific Instruments
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with scan correction
- Patent number 6,057,547
- Issue date May 2, 2000
- ThermoMicorosRescoper, Corp
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with scan correction
- Patent number 5,939,719
- Issue date Aug 17, 1999
- ThermoMicroscopes Corporation
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope having a single viewing device for on-axi...
- Patent number 5,877,891
- Issue date Mar 2, 1999
- Park Scientific Instruments
- Sano-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrohydrodynamic ink jet printer and printing method
- Patent number 5,838,349
- Issue date Nov 17, 1998
- Natural Imaging Corporation
- Dong Ho Choi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Scanning probe microscope having a single viewing device for on-axi...
- Patent number 5,714,756
- Issue date Feb 3, 1998
- Park Scientific Instruments
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Large stage system for scanning probe microscopes and other instrum...
- Patent number 5,672,816
- Issue date Sep 30, 1997
- Park Scientific Instruments
- Sang-il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 5,496,999
- Issue date Mar 5, 1996
- Frederick I. Linker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical system for scanning microscope
- Patent number 5,448,399
- Issue date Sep 5, 1995
- Park Scientific Instruments
- Sang-Il Park
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20100091284
- Publication date Apr 15, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20090284744
- Publication date Nov 19, 2009
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080094630
- Publication date Apr 24, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080049226
- Publication date Feb 28, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080024766
- Publication date Jan 31, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Metrology system using optical phase
- Publication number 20050094153
- Publication date May 5, 2005
- Mehrdad Nikoonahad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040257571
- Publication date Dec 23, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233442
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233443
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233439
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233441
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233440
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233444
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Metrology system using optical phase
- Publication number 20040207849
- Publication date Oct 21, 2004
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for detecting overlay errors using scatterometry
- Publication number 20040169861
- Publication date Sep 2, 2004
- KLA-Tenor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Submicron dimensional calibration standards and methods of manufact...
- Publication number 20030058437
- Publication date Mar 27, 2003
- Marco Tortonese
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical system for scanning microscope
- Publication number 20010054691
- Publication date Dec 27, 2001
- Sang-Il Park
- B82 - NANO-TECHNOLOGY

Ian R. Smith

Person

Patents Grantslast 30 patents

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Electrical test method and apparatus

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Calibration standards and methods

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Methods for forming a calibration standard and calibration standard...

Power assisted automatic supervised classifier creation tool for se...

Metrology system using optical phase

Submicron dimensional calibration standards and methods of manufact...

Optical system for scanning microscope

Scanning probe microscope with scan correction

Scanning probe microscope with multimode head

Scanning probe microscope with scan correction

Scanning probe microscope with scan correction

Scanning probe microscope having a single viewing device for on-axi...

Electrohydrodynamic ink jet printer and printing method

Scanning probe microscope having a single viewing device for on-axi...

Large stage system for scanning probe microscopes and other instrum...

Scanning probe microscope

Optical system for scanning microscope

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Metrology system using optical phase

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Metrology system using optical phase

Apparatus and method for detecting overlay errors using scatterometry

Submicron dimensional calibration standards and methods of manufact...

Optical system for scanning microscope