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Ibuki HAYASHI
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Iwate, JP
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240295027
Publication date
Sep 5, 2024
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230257877
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230260760
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...