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Ichiro Hayashi
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Itami, JP
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last 30 patents
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Patent Grant
Apparatus for producing semiconductor device
Patent number
5,332,406
Issue date
Jul 26, 1994
Mitsubishi Denki Kabushiki Kaisha
Toshio Takeuchi
B28 - WORKING CEMENT, CLAY, OR STONE
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Patent Grant
Method of dividing semiconductor wafer using ultraviolet sensitive...
Patent number
5,238,876
Issue date
Aug 24, 1993
Mitsubishi Denki Kabushiki Kaisha
Toshio Takeuchi
B28 - WORKING CEMENT, CLAY, OR STONE
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Patent Grant
Semiconductor wafer breaking apparatus
Patent number
4,775,085
Issue date
Oct 4, 1988
Mitsubishi Denki Kabushiki Kaisha
Masahiro Ishizuka
B28 - WORKING CEMENT, CLAY, OR STONE