Ichiro Kagami

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam exposure mask and electron beam exposure method using...
- Patent number 6,972,165
- Issue date Dec 6, 2005
- Sony Corporation
- Ichiro Kagami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron beam exposure-use mask and electron beam exposure method
- Publication number 20040013949
- Publication date Jan 22, 2004
- Ichiro Kagami
- B82 - NANO-TECHNOLOGY