Ichiro Katakabe

Person

Kanagawa-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and su...
- Patent number 7,578,886
- Issue date Aug 25, 2009
- Ebara Corporation
- Kaoru Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,578,887
- Issue date Aug 25, 2009
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 7,309,449
- Issue date Dec 18, 2007
- Ebara Corporation
- Haruko Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Revolution member supporting apparatus and semiconductor substrate...
- Patent number 6,921,466
- Issue date Jul 26, 2005
- Ebara Corporation
- Akihisa Hongo
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for etching ruthenium films
- Patent number 6,776,919
- Issue date Aug 17, 2004
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,745,784
- Issue date Jun 8, 2004
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,558,478
- Issue date May 6, 2003
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20100043839
- Publication date Feb 25, 2010
- Satomi Hamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Revolution member supporting apparatus and semiconductor substrate...
- Publication number 20090026068
- Publication date Jan 29, 2009
- Akihisa Hongo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate Processing Apparatus and Method
- Publication number 20080110861
- Publication date May 15, 2008
- Shinji Kajita
- B08 - CLEANING
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20080017220
- Publication date Jan 24, 2008
- Masako Kodera
- B08 - CLEANING
Information Patent Application
Revolution member supporting apparatus and semiconductor substrate...
- Publication number 20070113977
- Publication date May 24, 2007
- Akihisa Hongo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus, substrate processing method, and su...
- Publication number 20060234503
- Publication date Oct 19, 2006
- Kaoru Yamada
- B08 - CLEANING
Information Patent Application
Revolution member supporting apparatus and semiconductor substrate...
- Publication number 20050087441
- Publication date Apr 28, 2005
- Akihisa Hongo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050026455
- Publication date Feb 3, 2005
- Satomi Hamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and post-electroless plating cleaning...
- Publication number 20040245214
- Publication date Dec 9, 2004
- Ichiro Katakabe
- B08 - CLEANING
Information Patent Application
Substrate processing method
- Publication number 20040226915
- Publication date Nov 18, 2004
- Haruko Ono
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Apparatus for and method of processing substrate
- Publication number 20040211959
- Publication date Oct 28, 2004
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20040177655
- Publication date Sep 16, 2004
- Masako Kodera
- B08 - CLEANING
Information Patent Application
Method of and apparatus for cleaning substrate
- Publication number 20030168089
- Publication date Sep 11, 2003
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20030092264
- Publication date May 15, 2003
- Shinji Kajita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for etching ruthenium films
- Publication number 20020060202
- Publication date May 23, 2002
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Revolution member supporting apparatus and semiconductor substrate...
- Publication number 20020006876
- Publication date Jan 17, 2002
- Akihisa Hongo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Ichiro Katakabe

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method, and su...

Apparatus for and method of processing substrate

Substrate processing method

Revolution member supporting apparatus and semiconductor substrate...

Method and apparatus for etching ruthenium films

Method of and apparatus for cleaning substrate

Method of and apparatus for cleaning substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

Revolution member supporting apparatus and semiconductor substrate...

Substrate Processing Apparatus and Method

Apparatus for cleaning a substrate having metal interconnects

Revolution member supporting apparatus and semiconductor substrate...

Substrate processing apparatus, substrate processing method, and su...

Revolution member supporting apparatus and semiconductor substrate...

Substrate processing apparatus and substrate processing method

Electroless plating apparatus and post-electroless plating cleaning...

Substrate processing method

Apparatus for and method of processing substrate

Apparatus for cleaning a substrate having metal interconnects

Method of and apparatus for cleaning substrate

Substrate processing apparatus and method

Method and apparatus for etching ruthenium films

Revolution member supporting apparatus and semiconductor substrate...