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Ichiro NAMIOKA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Processing device group controller, manufacturing process system, p...
Patent number
10,108,162
Issue date
Oct 23, 2018
Tokyo Electron Limited
Taku Mizutani
G05 - CONTROLLING REGULATING
Information
Patent Grant
Modifying operational efficiency by repositioning process apparatus
Patent number
10,012,980
Issue date
Jul 3, 2018
Tokyo Electron Limited
Taku Mizutani
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for monitoring failure of substrate processing apparatus, an...
Patent number
9,412,256
Issue date
Aug 9, 2016
Tokyo Electron Limited
Ichiro Namioka
G08 - SIGNALLING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM FOR MONITORING FAILURE OF SUBSTRATE PROCESSING APPARATUS, AN...
Publication number
20150084772
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Ichiro Namioka
G08 - SIGNALLING
Information
Patent Application
ENERGY-CONSUMPTION MONITORING SYSTEM FOR SUBSTRATE PROCESSING APPAR...
Publication number
20150032246
Publication date
Jan 29, 2015
TOKYO ELECTRON LIMITED
Taku Mizutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCTION PROCESSING SYSTEM, PRODUCTION EFFICIENCY IMPROVEMENT DEV...
Publication number
20140297017
Publication date
Oct 2, 2014
Taku MIZUTANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, P...
Publication number
20140257546
Publication date
Sep 11, 2014
TOKYO ELECTRON LIMITED
Taku MIZUTANI
H01 - BASIC ELECTRIC ELEMENTS