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Ichiro NUNOMURA
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and recording medium for changing at...
Patent number
11,521,880
Issue date
Dec 6, 2022
Kokusai Electric Corporation
Satoru Takahata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus, controller and processing system
Patent number
10,452,856
Issue date
Oct 22, 2019
Kokusai Electric Corporation
Ichiro Nunomura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing apparatus, control method of the substrate pro...
Patent number
8,457,774
Issue date
Jun 4, 2013
Hitachi Kokusai Electric Inc.
Yukio Ozaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, APPARATUS START-UP METHOD, METHOD O...
Publication number
20230326771
Publication date
Oct 12, 2023
Kokusai Electric Corporation
Yasuhiro MIZUGUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230187243
Publication date
Jun 15, 2023
Kokusai Electric Corporation
Jin SHIBATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
Publication number
20200035533
Publication date
Jan 30, 2020
Kokusai Electric Corporation
Satoru TAKAHATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND ITS MAINTENANCE METHOD, SUBSTRAT...
Publication number
20130247937
Publication date
Sep 26, 2013
Ichiro NUNOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF THE SUBSTRATE PRO...
Publication number
20110082581
Publication date
Apr 7, 2011
Hitachi Kokusai Electric Inc.
Yukio OZAKI
H01 - BASIC ELECTRIC ELEMENTS